Dual CVD System

Facility/equipment: Equipment

  • LocationShow on map

    Semiconductors and Photovoltaics Lab, Department of Physics, MIT, Manipal

    India

Equipments Details

Description

Tubular quartz tube chamber with 45 mm inner diameter. Independent dual temperature zone (capable upto 900 degree celsius) with separated PID temperature controller for each zone. Eqqipped with nitrogen, argon and oxygen atmosphere with respective mass flow controllers with a maximum flow rate of 500 sccm.

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