TY - JOUR
T1 - A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere
AU - Das, Soham
AU - Guha, Spandan
AU - Ghadai, Ranjan
AU - Swain, Bibhu Prasad
N1 - Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2021/1/15
Y1 - 2021/1/15
N2 - Titanium nitride (TiN), Titanium aluminum nitride (TiAlN), and Titanium aluminum silicon nitride (TiAlSiN) coatings were deposited over Silicon (Si) (100) substrates using chemical vapor deposition (CVD) process at a constant temperature under different N2 flow rate. Scanning electron microscopy (SEM) images reveal a smoother TiN coating surface compared to other coatings. Atomic force microscopy (AFM) indicates enhancement of particle size of TiN and TiAlN coatings with higher N2 gas flow rate. However, the particle size of TiAlSiN found to decrease with a higher N2 flow rate. X-ray diffraction (XRD) results confirm the diffraction phases of TiN, TiAlN and TiAlSiN at (111) and (200) crystal planes. The electrochemical test indicates higher corrosion resistance of TiAlSiN coating as compared to other coatings. Nano-indentation results reveal that TiAlSiN possesses higher hardness (H) and Young's modulus (E) as compared to other coatings.
AB - Titanium nitride (TiN), Titanium aluminum nitride (TiAlN), and Titanium aluminum silicon nitride (TiAlSiN) coatings were deposited over Silicon (Si) (100) substrates using chemical vapor deposition (CVD) process at a constant temperature under different N2 flow rate. Scanning electron microscopy (SEM) images reveal a smoother TiN coating surface compared to other coatings. Atomic force microscopy (AFM) indicates enhancement of particle size of TiN and TiAlN coatings with higher N2 gas flow rate. However, the particle size of TiAlSiN found to decrease with a higher N2 flow rate. X-ray diffraction (XRD) results confirm the diffraction phases of TiN, TiAlN and TiAlSiN at (111) and (200) crystal planes. The electrochemical test indicates higher corrosion resistance of TiAlSiN coating as compared to other coatings. Nano-indentation results reveal that TiAlSiN possesses higher hardness (H) and Young's modulus (E) as compared to other coatings.
UR - https://www.scopus.com/pages/publications/85091942817
UR - https://www.scopus.com/inward/citedby.url?scp=85091942817&partnerID=8YFLogxK
U2 - 10.1016/j.matchemphys.2020.123866
DO - 10.1016/j.matchemphys.2020.123866
M3 - Article
AN - SCOPUS:85091942817
SN - 0254-0584
VL - 258
JO - Materials Chemistry and Physics
JF - Materials Chemistry and Physics
M1 - 123866
ER -