An Investigation of the Structural and Surface Topography of Aluminum Nitride Thin Films Deposited at Low Sputtering Power for Piezoelectric Applications
- R. Jyothilakshmi
- , S. Sandeep
- , Yu A. Mityagin*
- , M. P. Telenkov
- , K. K. Nagaraja*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
2
Link opens in a new tab
Citations
(Scopus)