An Investigation of the Structural and Surface Topography of Aluminum Nitride Thin Films Deposited at Low Sputtering Power for Piezoelectric Applications

  • R. Jyothilakshmi
  • , S. Sandeep
  • , Yu A. Mityagin*
  • , M. P. Telenkov
  • , K. K. Nagaraja*
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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