Correlation between structural and mechanical properties of silicon doped DLC thin films

Ranjan Kr Ghadai; Soham Das; Dhruva Kumar; Subhash C. Mondal; Bibhu P. Swain

doi:10.1016/j.diamond.2017.12.012

Correlation between structural and mechanical properties of silicon doped DLC thin films

Ranjan Kr Ghadai
, Soham Das
, Dhruva Kumar
, Subhash C. Mondal
, Bibhu P. Swain^*

^*Corresponding author for this work

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

Silicon doped diamond like carbon (Si-DLC) thin films were deposited on SiO₂/Si substrates with different H₂ flow rate. The deposited Si-DLC films were characterized by field emission scanning electron microscopy (FESEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and nanoindentation characterizations. The FESEM images reveal the smooth Si-DLC thin films at lower H₂ flow rate, however, increased surface roughness with increasing H₂ flow rate. The Raman spectroscopy of Si-DLC thin films confirmed carbon nanocluster decreasing from 60.4 to 49.3 nm with increasing of H₂ flow rates. The Raman signature at 796, 968 and 1530 cm^{− 1} correspond to transverse optic (TO), longitudinal optic (LO) and Si attachment to graphitic carbon respectively in the Si-DLC thin films. The maximum hardness and Young's modulus were 17.95 GPa and 186.65 GPa for 70 sccm and 90 sccm H₂ flow rate respectably. The XPS results reveal Si at.% decreased from 18.91 to 14.15 of the Si-DLC thin films within creased by H₂ flow rate.

Original language	English
Pages (from-to)	25-32
Number of pages	8
Journal	Diamond and Related Materials
Volume	82
DOIs	https://doi.org/10.1016/j.diamond.2017.12.012
Publication status	Published - 02-2018

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
General Chemistry
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/j.diamond.2017.12.012

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title = "Correlation between structural and mechanical properties of silicon doped DLC thin films",

abstract = "Silicon doped diamond like carbon (Si-DLC) thin films were deposited on SiO2/Si substrates with different H2 flow rate. The deposited Si-DLC films were characterized by field emission scanning electron microscopy (FESEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and nanoindentation characterizations. The FESEM images reveal the smooth Si-DLC thin films at lower H2 flow rate, however, increased surface roughness with increasing H2 flow rate. The Raman spectroscopy of Si-DLC thin films confirmed carbon nanocluster decreasing from 60.4 to 49.3 nm with increasing of H2 flow rates. The Raman signature at 796, 968 and 1530 cm− 1 correspond to transverse optic (TO), longitudinal optic (LO) and Si attachment to graphitic carbon respectively in the Si-DLC thin films. The maximum hardness and Young's modulus were 17.95 GPa and 186.65 GPa for 70 sccm and 90 sccm H2 flow rate respectably. The XPS results reveal Si at.\% decreased from 18.91 to 14.15 of the Si-DLC thin films within creased by H2 flow rate.",

author = "Ghadai, \{Ranjan Kr\} and Soham Das and Dhruva Kumar and Mondal, \{Subhash C.\} and Swain, \{Bibhu P.\}",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",

year = "2018",

month = feb,

doi = "10.1016/j.diamond.2017.12.012",

language = "English",

volume = "82",

pages = "25--32",

journal = "Diamond and Related Materials",

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publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Correlation between structural and mechanical properties of silicon doped DLC thin films

AU - Ghadai, Ranjan Kr

AU - Das, Soham

AU - Kumar, Dhruva

AU - Mondal, Subhash C.

AU - Swain, Bibhu P.

PY - 2018/2

Y1 - 2018/2

N2 - Silicon doped diamond like carbon (Si-DLC) thin films were deposited on SiO2/Si substrates with different H2 flow rate. The deposited Si-DLC films were characterized by field emission scanning electron microscopy (FESEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and nanoindentation characterizations. The FESEM images reveal the smooth Si-DLC thin films at lower H2 flow rate, however, increased surface roughness with increasing H2 flow rate. The Raman spectroscopy of Si-DLC thin films confirmed carbon nanocluster decreasing from 60.4 to 49.3 nm with increasing of H2 flow rates. The Raman signature at 796, 968 and 1530 cm− 1 correspond to transverse optic (TO), longitudinal optic (LO) and Si attachment to graphitic carbon respectively in the Si-DLC thin films. The maximum hardness and Young's modulus were 17.95 GPa and 186.65 GPa for 70 sccm and 90 sccm H2 flow rate respectably. The XPS results reveal Si at.% decreased from 18.91 to 14.15 of the Si-DLC thin films within creased by H2 flow rate.

AB - Silicon doped diamond like carbon (Si-DLC) thin films were deposited on SiO2/Si substrates with different H2 flow rate. The deposited Si-DLC films were characterized by field emission scanning electron microscopy (FESEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and nanoindentation characterizations. The FESEM images reveal the smooth Si-DLC thin films at lower H2 flow rate, however, increased surface roughness with increasing H2 flow rate. The Raman spectroscopy of Si-DLC thin films confirmed carbon nanocluster decreasing from 60.4 to 49.3 nm with increasing of H2 flow rates. The Raman signature at 796, 968 and 1530 cm− 1 correspond to transverse optic (TO), longitudinal optic (LO) and Si attachment to graphitic carbon respectively in the Si-DLC thin films. The maximum hardness and Young's modulus were 17.95 GPa and 186.65 GPa for 70 sccm and 90 sccm H2 flow rate respectably. The XPS results reveal Si at.% decreased from 18.91 to 14.15 of the Si-DLC thin films within creased by H2 flow rate.

UR - https://www.scopus.com/pages/publications/85039451704

UR - https://www.scopus.com/pages/publications/85039451704#tab=citedBy

U2 - 10.1016/j.diamond.2017.12.012

DO - 10.1016/j.diamond.2017.12.012

M3 - Article

AN - SCOPUS:85039451704

SN - 0925-9635

VL - 82

SP - 25

EP - 32

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -

Correlation between structural and mechanical properties of silicon doped DLC thin films

Abstract

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