Design and Fabrication of Aluminium Nitride Based Micro Cantilever Sensor for the Detection of Carbon Dioxide

In this work, we describe the design and fabrication of the microcantilever for CO₂ detection employing a new aluminum nitrate. The microcantilever was designed using COMSOL Multiphysics, and it was then fabricated using a combination of bulk and surface micromachining techniques. A Laser Doppler Vibrometer (LDV) was used to test the devices and determine their resonant frequency, while a Field Emission Scanning Electron Microscope (FESEM) was used to analyze the device's dimensions. The fabricated device displays first harmonics at 729 Hz, second harmonics at 845 Hz, and third harmonics at 2191 Hz. Subsequently, the developed device was utilized with a gas sensor setup to detect CO₂, and it responded well to the gas. In conclusion, there is a strong correlation between the synthesized device properties and the simulated outcomes obtained from the resonant frequency calculation.