Dynamic simulation of micro resonator based differential pressure sensor

G. Uma; M. Umapathy; S. Meenatchisundaram

doi:10.1117/12.716061

Dynamic simulation of micro resonator based differential pressure sensor

G. Uma^*
, M. Umapathy
, S. Meenatchisundaram

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.

Original language	English
Title of host publication	Nanosensors, Microsensors, and Biosensors and Systems 2007
Volume	6528
DOIs	https://doi.org/10.1117/12.716061
Publication status	Published - 01-11-2007
Event	Nanosensors, Microsensors, and Biosensors and Systems 2007 - San Diego, CA, United States Duration: 21-03-2007 → 22-03-2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6528
ISSN (Print)	0277-786X

Conference

Conference	Nanosensors, Microsensors, and Biosensors and Systems 2007
Country/Territory	United States
City	San Diego, CA
Period	21-03-07 → 22-03-07

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.716061

Cite this

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title = "Dynamic simulation of micro resonator based differential pressure sensor",

abstract = "In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.",

author = "G. Uma and M. Umapathy and S. Meenatchisundaram",

year = "2007",

month = nov,

day = "1",

doi = "10.1117/12.716061",

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volume = "6528",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Nanosensors, Microsensors, and Biosensors and Systems 2007",

note = "Nanosensors, Microsensors, and Biosensors and Systems 2007 ; Conference date: 21-03-2007 Through 22-03-2007",

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Uma, G, Umapathy, M & Meenatchisundaram, S 2007, Dynamic simulation of micro resonator based differential pressure sensor. in Nanosensors, Microsensors, and Biosensors and Systems 2007. vol. 6528, 65281G, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007, San Diego, CA, United States, 21-03-07. https://doi.org/10.1117/12.716061

Dynamic simulation of micro resonator based differential pressure sensor. / Uma, G.; Umapathy, M.; Meenatchisundaram, S.
Nanosensors, Microsensors, and Biosensors and Systems 2007. Vol. 6528 2007. 65281G (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6528).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Dynamic simulation of micro resonator based differential pressure sensor

AU - Uma, G.

AU - Umapathy, M.

AU - Meenatchisundaram, S.

PY - 2007/11/1

Y1 - 2007/11/1

N2 - In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.

AB - In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.

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SN - 9780819466495

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Nanosensors, Microsensors, and Biosensors and Systems 2007

T2 - Nanosensors, Microsensors, and Biosensors and Systems 2007

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ER -

Dynamic simulation of micro resonator based differential pressure sensor

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