Effect of doping concentration on the performance of a thermally actuated MEMS resonator using piezoresistive readout

  • P. A. Ajeesh*
  • , Ribu Mathew
  • , A. Ravi Sankar
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of doping concentration on the performance of a thermally actuated MEMS resonator using piezoresistive readout'. Together they form a unique fingerprint.

INIS

Engineering

Material Science