Effect of number of sol-layer on structural, optical, morphological, and compositional properties of HfO2 films

Sabhya, Dhananjaya Kekuda, Murari M.S, Mohan Rao K

Research output: Contribution to journalArticlepeer-review

Abstract

Using sol-gel based spin coating HfO2 thin films were prepared on quartz substrates. The effect of sol-layer thickness on structural, optical, morphological and compositional properties was investigated. The structural studies done using X-Ray Diffraction (XRD) and Raman confirm the presence of a polycrystalline monoclinic phase of HfO2. Atomic Force Microscopy (AFM) and Field Emission Scanning Electron Microscope (FESEM) studies reveal a uniform distribution of grains on the substrates. An increment in Hf is confirmed from Energy Dispersive Spectroscopy (EDS) with respect to the number of sol-layers. From XPS results existence of oxygen vacancies and the formation of HfO2 was noted. These results suggest that tailoring the number of sol-layers plays a crucial role in modifying the properties of HfO2 based thin films.

Original languageEnglish
Article number415605
JournalPhysica B: Condensed Matter
Volume675
DOIs
Publication statusPublished - 15-02-2024

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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