Experimentally validated finite element model for mechanical and fracture characteristics of SiCN thin films under different loads
- Dhruva Kumar
- , Rajesh Kumar Meena
- , Hirshikesh
- , Ranjan Kumar Ghadai*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
1
Link opens in a new tab
Citation
(Scopus)