Abstract
The present investigation reports the fabrication and characterization of multilayered transparent electrodes by simultaneous DC and RF magnetron sputtering on glass substrates. The multilayer structure consists of three layers (ZnO/Al/ZnO). The influence of Al layer thickness on the electrical and optical properties was investigated. Optimum thickness of Al was determined for high transmittance and good electrical conductivity. High quality films having resistance as low as 25 Ω/sq with optical transmittance upto 65% were obtained at room temperature.
| Original language | English |
|---|---|
| Article number | 012071 |
| Journal | IOP Conference Series: Materials Science and Engineering |
| Volume | 73 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 01-01-2015 |
| Event | International Conference on Materials Science and Technology, ICMST 2012 - Kerala, India Duration: 10-06-2012 → 14-06-2012 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- General Engineering
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