Abstract
We report on the design and construction of a laser scanning optical beam-induced current (OBIC) microscope by assembling cost-effective commercial optical and electronic hardware components and developing data acquisition and control software in LabVIEW. A preliminary OBIC image of a Si photodetector acquired by the developed microscope is presented to demonstrate its operational capability. The versatility of the design will allow for the construction of other scanning microscope modalities on the same platform.
| Original language | English |
|---|---|
| Article number | 6900105 |
| Pages (from-to) | 1-5 |
| Number of pages | 5 |
| Journal | IEEE Photonics Journal |
| Volume | 16 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 01-02-2024 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering
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