High thermal stability of the reflectivity of Be/Al multilayer mirrors designed for extreme ultraviolet wavelength

  • Niranjan Kumar*
  • , Kalpataru Panda
  • , Roman S. Pleshkov
  • , Aleksey V. Nezhdanov
  • , Vladimir N. Polkovnikov
  • , Pavel A. Yunin
  • , Nikolay I. Chkhalo
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    1 Citation (Scopus)

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    Material Science