Improvement in wear resistance of C+ ion implanted DC magnetron sputtered TiC film

Revati Rani; N. Kumar; D. Dinesh Kumar; Kalpatru Panda; S. K. Srivastava; S. Dash; A. K. Tyagi

doi:10.1016/j.triboint.2016.08.033

Improvement in wear resistance of C⁺ ion implanted DC magnetron sputtered TiC film

Revati Rani
, N. Kumar^*
, D. Dinesh Kumar
, Kalpatru Panda
, S. K. Srivastava
, S. Dash
, A. K. Tyagi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

DC Magnetron sputtered TiC films were subjected to C⁺ ion implantation in order to modify the microstructure and topography. The surface roughness of implanted films increased due to ion beam induced surface bubbling and blistering. Hardness and Young's modulus values were decreased due to the amorphization of TiC crystalline phase. The adhesive strength of film-substrate interface was not influenced by C⁺ ion implantation. The tribological results showed considerable enhancement in the wear resistance in the highest dose C⁺ ion implanted film, compared to as-deposited TiC film. The enhanced properties are correlated to amorphization of TiC crystalline phase.

Original language	English
Pages (from-to)	121-130
Number of pages	10
Journal	Tribology International
Volume	104
DOIs	https://doi.org/10.1016/j.triboint.2016.08.033
Publication status	Published - 01-12-2016

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.triboint.2016.08.033

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title = "Improvement in wear resistance of C+ ion implanted DC magnetron sputtered TiC film",

abstract = "DC Magnetron sputtered TiC films were subjected to C+ ion implantation in order to modify the microstructure and topography. The surface roughness of implanted films increased due to ion beam induced surface bubbling and blistering. Hardness and Young's modulus values were decreased due to the amorphization of TiC crystalline phase. The adhesive strength of film-substrate interface was not influenced by C+ ion implantation. The tribological results showed considerable enhancement in the wear resistance in the highest dose C+ ion implanted film, compared to as-deposited TiC film. The enhanced properties are correlated to amorphization of TiC crystalline phase.",

author = "Revati Rani and N. Kumar and Kumar, \{D. Dinesh\} and Kalpatru Panda and Srivastava, \{S. K.\} and S. Dash and Tyagi, \{A. K.\}",

note = "Publisher Copyright: {\textcopyright} 2016 Elsevier Ltd",

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doi = "10.1016/j.triboint.2016.08.033",

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T1 - Improvement in wear resistance of C+ ion implanted DC magnetron sputtered TiC film

AU - Rani, Revati

AU - Kumar, N.

AU - Kumar, D. Dinesh

AU - Panda, Kalpatru

AU - Srivastava, S. K.

AU - Dash, S.

AU - Tyagi, A. K.

PY - 2016/12/1

Y1 - 2016/12/1

N2 - DC Magnetron sputtered TiC films were subjected to C+ ion implantation in order to modify the microstructure and topography. The surface roughness of implanted films increased due to ion beam induced surface bubbling and blistering. Hardness and Young's modulus values were decreased due to the amorphization of TiC crystalline phase. The adhesive strength of film-substrate interface was not influenced by C+ ion implantation. The tribological results showed considerable enhancement in the wear resistance in the highest dose C+ ion implanted film, compared to as-deposited TiC film. The enhanced properties are correlated to amorphization of TiC crystalline phase.

AB - DC Magnetron sputtered TiC films were subjected to C+ ion implantation in order to modify the microstructure and topography. The surface roughness of implanted films increased due to ion beam induced surface bubbling and blistering. Hardness and Young's modulus values were decreased due to the amorphization of TiC crystalline phase. The adhesive strength of film-substrate interface was not influenced by C+ ion implantation. The tribological results showed considerable enhancement in the wear resistance in the highest dose C+ ion implanted film, compared to as-deposited TiC film. The enhanced properties are correlated to amorphization of TiC crystalline phase.

UR - https://www.scopus.com/pages/publications/84984856711

UR - https://www.scopus.com/pages/publications/84984856711#tab=citedBy

U2 - 10.1016/j.triboint.2016.08.033

DO - 10.1016/j.triboint.2016.08.033

M3 - Article

AN - SCOPUS:84984856711

SN - 0301-679X

VL - 104

SP - 121

EP - 130

JO - Tribology International

JF - Tribology International

ER -

Improvement in wear resistance of C⁺ ion implanted DC magnetron sputtered TiC film

Abstract

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