Low frequency piezoelectric P(VDF-TrFE) micro-cantilevers with a novel MEMS process for vibration sensor and energy harvester applications

INIS

• applications 100%
• energy 100%
• power 100%
• simulation 100%
• piezoelectricity 100%
• sensors 100%
• devices 66%
• design 66%
• suspensions 66%
• output 66%
• electrodes 66%
• machining 66%
• thickness 33%
• width 33%
• comparative evaluations 33%
• volume 33%
• oxygen 33%
• polymers 33%
• extraction 33%
• plasma 33%
• length 33%
• values 33%
• evaporation 33%
• thin films 33%
• films 33%
• finite element method 33%
• copolymers 33%
• dimensions 33%
• lasers 33%
• power density 33%
• anisotropy 33%
• silicon 33%
• etching 33%
• spin-on coating 33%

Engineering

• Piezoelectric 100%
• Microelectromechanical System 100%
• Energy Engineering 100%
• Harvester 100%
• Micro-Cantilevers 100%
• Power Output 20%
• Micro Machining 20%
• Simulation Result 10%
• Experimental Result 10%
• Anisotropic 10%
• Process Step 10%
• Power Density 10%
• Coating Technique 10%
• Deposited Film 10%
• Piezoelectric Polymer 10%
• Thin Films 10%
• Longitudinal Mode 10%
• Finite Element Analysis 10%
• Silicon Dioxide 10%
• Resonant Frequency 10%
• Si Wafer 10%

Material Science

• Piezoelectricity 100%
• Microelectromechanical System 100%
• Micromachining 66%
• Density 33%
• Polymer Films 33%
• Finite Element Methods 33%
• Copolymer 33%
• Spin Coating 33%
• Silicon 33%
• Thin Films 33%
• Plasma Etching 33%