TY - JOUR
T1 - Material and geometry selection of a multi-layer microcantilever thermal sensor with piezoresistive readout
AU - Mathew, Ribu
AU - Krishna, Amal
AU - Nag, Kunal
AU - Sathvik, S.
AU - Sharma, Aditi
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2020/9/9
Y1 - 2020/9/9
N2 - In recent years, micro cantilever thermal sensors with integrated piezoresistive readout have been extensively explored. In this paper, we perform the material and geometry selection of a multi-layer cantilever thermal sensor for maximizing its thermal sensitivity. Present work is performed in two phases. In the first phase, material selection of constituent layers of the cantilever thermal sensor is performed considering various material set reported in the literature. Subsequently, impact of sensor geometry on thermal and electrical sensitivities of the sensor is investigated using computations. Results show that for the chosen material set compared to various cantilever shapes reported in the literature, slender rectangular cantilever platform depicts higher thermal sensitivity. Further, it is observed that the sensor depicts an electrical sensitivity in the range of 1∗10-2.
AB - In recent years, micro cantilever thermal sensors with integrated piezoresistive readout have been extensively explored. In this paper, we perform the material and geometry selection of a multi-layer cantilever thermal sensor for maximizing its thermal sensitivity. Present work is performed in two phases. In the first phase, material selection of constituent layers of the cantilever thermal sensor is performed considering various material set reported in the literature. Subsequently, impact of sensor geometry on thermal and electrical sensitivities of the sensor is investigated using computations. Results show that for the chosen material set compared to various cantilever shapes reported in the literature, slender rectangular cantilever platform depicts higher thermal sensitivity. Further, it is observed that the sensor depicts an electrical sensitivity in the range of 1∗10-2.
UR - https://www.scopus.com/pages/publications/85091745868
UR - https://www.scopus.com/inward/citedby.url?scp=85091745868&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/1451/1/012002
DO - 10.1088/1742-6596/1451/1/012002
M3 - Conference article
AN - SCOPUS:85091745868
SN - 1742-6588
VL - 1451
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012002
T2 - 2nd International Conference on Applied Physics, Power and Material Science, ICAPPM 2019
Y2 - 20 December 2019 through 21 December 2019
ER -