TY - JOUR
T1 - Microstructural and piezoelectric properties of ZnO films
AU - A, Ayana
AU - Hou, Fei
AU - Seidel, Jan
AU - B V, Rajendra
AU - Sharma, Pankaj
N1 - Funding Information:
Ms. Ayana would like to acknowledge the Manipal Academy of Higher Education (MAHE) for providing experimental facilities. The authors are grateful for the financial support provided by UNSW-MAHE collaboration seed grant (RG194284-D). The authors would also like to thank the UGC-DAE CSR, Mumbai center, India, for providing financial support [UDCSR/MUM/AO/CRS-M-315/2020/813].
Funding Information:
Ms. Ayana would like to acknowledge the Manipal Academy of Higher Education (MAHE) for providing experimental facilities. The authors are grateful for the financial support provided by UNSW-MAHE collaboration seed grant ( RG194284-D ). The authors would also like to thank the UGC-DAE CSR, Mumbai center, India , for providing financial support [ UDCSR/MUM/AO/CRS-M-315/2020/813 ].
Publisher Copyright:
© 2022 Elsevier Ltd
PY - 2022/8/1
Y1 - 2022/8/1
N2 - Using the chemical spray pyrolysis method, nanostructured ZnO films have been synthesized on p-type silicon substrates. The fabricated films are grown at different deposition temperatures (300–500 °C) and are characterized using a combination of microstructural, electrical, and nanoscopic piezoelectric techniques. The X-ray diffraction results, in agreement with piezoresponse force microscopy, confirm that the deposits have a hexagonal wurtzite structure with a change in preferred orientation from (0 0 2) to (1 0 1) with an increase in the deposition temperature above 350 °C. ZnO nanostructures with the optimal crystallinity, electrical mobility, and carrier concentration are obtained at 450 °C. XPS spectra are used to determine the chemical state and elemental composition of the films. The decrease in bandgap with the increase in temperature is well correlated with calculated crystallite size. The samples deposited at lower temperatures show the strongest blue emission due to its defective nature. A comparative nanoscale piezoelectric investigation reveals enhanced piezoelectric response at 350 °C compared to samples fabricated at other deposition temperatures. Our study thus sheds light on the important role of the deposition temperatures in control and tuning the microstructural and piezoelectric properties of the spray pyrolyzed ZnO films.
AB - Using the chemical spray pyrolysis method, nanostructured ZnO films have been synthesized on p-type silicon substrates. The fabricated films are grown at different deposition temperatures (300–500 °C) and are characterized using a combination of microstructural, electrical, and nanoscopic piezoelectric techniques. The X-ray diffraction results, in agreement with piezoresponse force microscopy, confirm that the deposits have a hexagonal wurtzite structure with a change in preferred orientation from (0 0 2) to (1 0 1) with an increase in the deposition temperature above 350 °C. ZnO nanostructures with the optimal crystallinity, electrical mobility, and carrier concentration are obtained at 450 °C. XPS spectra are used to determine the chemical state and elemental composition of the films. The decrease in bandgap with the increase in temperature is well correlated with calculated crystallite size. The samples deposited at lower temperatures show the strongest blue emission due to its defective nature. A comparative nanoscale piezoelectric investigation reveals enhanced piezoelectric response at 350 °C compared to samples fabricated at other deposition temperatures. Our study thus sheds light on the important role of the deposition temperatures in control and tuning the microstructural and piezoelectric properties of the spray pyrolyzed ZnO films.
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U2 - 10.1016/j.mssp.2022.106680
DO - 10.1016/j.mssp.2022.106680
M3 - Article
AN - SCOPUS:85127130805
SN - 1369-8001
VL - 146
JO - Materials Science in Semiconductor Processing
JF - Materials Science in Semiconductor Processing
M1 - 106680
ER -