Morphological and Structural Properties of CVD Deposited Titanium Aluminium Nitride (TiAlN) Thin Films

  • Soham Das
  • , Spandan Guha
  • , Ranjan Ghadai
  • , Dhruva Kumar
  • , Bibhu P. Swain

Research output: Contribution to journal › Conference article › peer-review

11 Citations (Scopus)

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Material Science