Multiphysics simulation and analysis of MEMS-based chevron shaped electro-thermal actuator for quad-way switching application

This investigation presents a novel MEMS Quad Electro-Thermal Actuator design for switching applications that focuses primarily on the design, optimization, and device modelingg of a four-way switching bent-beam actuator using COMSOL Multiphysics simulation platform. The structure is energized by providing potential to bent beams anchored at both ends, Joule heating causes thermal expansion in the beams, and the apex advances due to the beams' pre-shape in the form of an offset angle. The overall device dimensions fall in 5 mm × 5 mm. A one-way actuator with seven pairs of chevrons configured bent-beams bridged by a moving shuttle topology, results in a total translational stroke parallel to the substrate was found to be 41.8 μm at a potential 5 V with an ambient temperature of 20 °C.