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Nanosheet Field Effect Transistor Device and Circuit Aspects for Future Technology Nodes

  • Aruru Sai Kumar
  • , V. Bharath Sreenivasulu*
  • , Subba Reddy Chavva
  • , Sheetal Bhandari
  • , N. Aruna Kumari
  • , Anitha Pothabolu
  • , M. Deekshana
  • , Rajendra Prasad Somineni
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Moore’s law states that the technical innovations are being absorbed already. The device’s controllability has dramatically improved since moving from a straightforward MOSFET constructed with a single control gate to one with many control gates. In this research paper, the device-level simulation of vertically stacked GAA nanosheet FET is performed, for which the various geometrical variations are calibrated. This research paper examines the impact of these geometrical variations on the device’s performance. The most prominent parameters like I ON, I OFF, SS, DIBL, switching ratio, and Threshold voltage values are analyzed. For the device to be considered to have better performance I ON should be maximum, I OFF should be minimum. Hence to obtain this the thickness of the nanosheet is varied on the scale of 5 nm to 9 nm, and the width is varied from 10 nm to 50 nm. The device simulation and analysis are performed using the Visual TCAD−3D Cogenda tool.

Original languageEnglish
Article number083009
JournalECS Journal of Solid State Science and Technology
Volume12
Issue number8
DOIs
Publication statusPublished - 08-2023

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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