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Nanostructured Thin Film Deposition by Sputtering

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Nanostructured Thin Film Deposition by Sputtering: From Fundamentals to Applications provides an exhaustive overview of the significant influence of sputtering in the production of nanostructured thin films. It begins with a review of the historical evolution and fundamental principles inherent to sputtering before delving into a thorough examination of thin films, covering their distinctive properties, the impact of sputtering, and the role of target materials. Building upon this base, the book unveils advanced sputtering methodologies, augmented with applicable case studies. The book provides an in-depth study of nanostructured thin films, addressing their diverse forms, and the elaborate procedures for nanostructure characterization. Finally, it embarks on an extensive analysis of the broad range of applications of sputtered nanostructured thin films, with a focus on sectors such as electronics, optics, biomedicine, and environmental science, as well as promising domains like automotive, oil and gas, food, and energy sectors. This approach offers a sweeping view of sputtering, bridging basic concepts and sophisticated aspects, thereby crafting an invaluable compendium for both researchers and learners in the field.

Original languageEnglish
Title of host publicationNanostructured Thin Film Deposition by Sputtering
Subtitle of host publicationFrom Fundamentals to Applications
PublisherElsevier
Pages1-209
Number of pages209
ISBN (Electronic)9780443298929
ISBN (Print)9780443298936
DOIs
Publication statusPublished - 01-01-2025

All Science Journal Classification (ASJC) codes

  • General Engineering
  • General Materials Science

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