Optimized electrode geometry for an improved impedance based macroporous silicon bacteria detector

This paper reports the optimization of electrode geometry on macroporous silicon biosensor for improved bacteria detection. Macroporous silicon of 8 μm thickness and 55% porosity has been fabricated on a 10-20 Ω-cm wafer using hydrofluoric acid and dimethyl sulfoxide. The electrode configurations selected for optimization are coplanar rectangular types with simple two-electrode, interdigitated comb finger-like electrode, and a combination of simple electrode and comb-shaped electrode designs. With these configurations, 14 different patterns have been generated with varying lengths and spacing within the technological constraints of low cost screen printing method of electrode fabrication with a wide range of effective exposed area from 0.04 to 0.6 μ ² by techniques from design of experiments. The sensitivity toward bacteria detection for all the patterns has been estimated by computation of an area utilization factor (AUF) which has been defined as the ratio of the effective area occupied by the captured bacteria to the effective exposed area available for capture. From the AUF values, eight patterns have been selected which are above a lower cut-off threshold for experimentation with E.coli O157 in the range of 10 ² CFU/ml to 10 ⁶ CFU/ml. It has been observed that the pattern with the highest AUF is capable of detecting 10 ²CFU/ml E.coli O157 with a sensitivity of 11% without any pre-concentration which was not possible in the earlier reports of macroporous silicon.