INIS
surfaces
100%
extraction
100%
beams
100%
devices
50%
young modulus
50%
levels
25%
thickness
25%
comparative evaluations
25%
geometry
25%
prediction
25%
values
25%
aluminum
25%
testing
25%
layers
25%
substrates
25%
actuators
25%
sensors
25%
resonance
25%
oxides
25%
frequency measurement
25%
microelectromechanical systems
25%
doped materials
25%
Engineering
Electrical Measurement
100%
Young's Modulus
100%
Cantilever Beam
50%
Test Structure
50%
Polysilicon
50%
Resonance Frequency
50%
Accurate Prediction
50%
Process Step
50%
Good Agreement
50%
Microelectromechanical System Sensor
50%
Material Science
Parameter Extraction
100%
Young's Modulus
100%
Actuator
50%
Aluminum
50%
Microelectromechanical System
50%
Oxide Compound
50%
Materials Property
50%