Simulation and optimisation of microresonators using sugar and multi-objective genetic algorithm (MOGA)

MEMS based micro-resonators are used in various applications such as to measure force, pressure, flow, acceleration, etc. In this paper it is proposed to implement an automated synthesis of folded flexure microresonator using Multi Objective Genetic Algorithm (MOGA) and SUGAR. A microresonator is MEMS based device in micro scale which changes its mechanical resonance frequency, as a function of a physical or chemical parameter which can be used for various applications like force, pressure, weight and load measurements. Various microresonator structures are created in SUGAR and its displacement is analyzed for a constant force applied on the x' direction. After the initial design and simulation, optimization of the structure was carried out for a range of desirable characteristics. Simulation results are automatically fed back to MOGA to find the optimum values.