Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz

Karthi Pradeep; Sebastien Fregonese; Marina Deng; Benjamin Dormieu; Patrick Scheer; Thomas Zimmer

doi:10.1109/ARFTG56062.2023.10148879

Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz

Karthi Pradeep^*
, Sebastien Fregonese
, Marina Deng
, Benjamin Dormieu
, Patrick Scheer
, Thomas Zimmer

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This study analyses the effect of test structure design for on-wafer TRL calibration of 28nm FD-SOI MOSFETs upto 110 GHz. Two different calibration kits are designed with and without continuous ground plane and their effect on the extracted transistor parameters are studied in terms of the measurement discontinuities encountered. Measurement results are discussed in conjunction with electromagnetic (EM) co-simulations, which use the small-signal equivalent circuit model of transistor along with the 3D models of the probes and test structures. The electric field coupling between the probes is visualised in each case and conclusions are drawn.

Original language	English
Title of host publication	100th ARFTG Microwave Measurement Conference
Subtitle of host publication	Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781665474948
DOIs	https://doi.org/10.1109/ARFTG56062.2023.10148879
Publication status	Published - 2023
Event	100th ARFTG Microwave Measurement Conference, ARFTG 2023 - Las Vegas, United States Duration: 22-01-2023 → 25-01-2023

Publication series

Name	100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023

Conference

Conference	100th ARFTG Microwave Measurement Conference, ARFTG 2023
Country/Territory	United States
City	Las Vegas
Period	22-01-23 → 25-01-23

All Science Journal Classification (ASJC) codes

Computer Networks and Communications
Signal Processing
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Instrumentation
Radiation

Access to Document

10.1109/ARFTG56062.2023.10148879

Cite this

Pradeep, K., Fregonese, S., Deng, M., Dormieu, B., Scheer, P., & Zimmer, T. (2023). Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz. In 100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023 (100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ARFTG56062.2023.10148879

Pradeep, Karthi ; Fregonese, Sebastien ; Deng, Marina et al. / Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz. 100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023. Institute of Electrical and Electronics Engineers Inc., 2023. (100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023).

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title = "Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz",

abstract = "This study analyses the effect of test structure design for on-wafer TRL calibration of 28nm FD-SOI MOSFETs upto 110 GHz. Two different calibration kits are designed with and without continuous ground plane and their effect on the extracted transistor parameters are studied in terms of the measurement discontinuities encountered. Measurement results are discussed in conjunction with electromagnetic (EM) co-simulations, which use the small-signal equivalent circuit model of transistor along with the 3D models of the probes and test structures. The electric field coupling between the probes is visualised in each case and conclusions are drawn.",

author = "Karthi Pradeep and Sebastien Fregonese and Marina Deng and Benjamin Dormieu and Patrick Scheer and Thomas Zimmer",

note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 100th ARFTG Microwave Measurement Conference, ARFTG 2023 ; Conference date: 22-01-2023 Through 25-01-2023",

year = "2023",

doi = "10.1109/ARFTG56062.2023.10148879",

language = "English",

series = "100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "100th ARFTG Microwave Measurement Conference",

address = "United States",

}

Pradeep, K, Fregonese, S, Deng, M, Dormieu, B, Scheer, P & Zimmer, T 2023, Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz. in 100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023. 100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023, Institute of Electrical and Electronics Engineers Inc., 100th ARFTG Microwave Measurement Conference, ARFTG 2023, Las Vegas, United States, 22-01-23. https://doi.org/10.1109/ARFTG56062.2023.10148879

Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz. / Pradeep, Karthi; Fregonese, Sebastien; Deng, Marina et al.
100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023. Institute of Electrical and Electronics Engineers Inc., 2023. (100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz

AU - Pradeep, Karthi

AU - Fregonese, Sebastien

AU - Deng, Marina

AU - Dormieu, Benjamin

AU - Scheer, Patrick

AU - Zimmer, Thomas

PY - 2023

Y1 - 2023

N2 - This study analyses the effect of test structure design for on-wafer TRL calibration of 28nm FD-SOI MOSFETs upto 110 GHz. Two different calibration kits are designed with and without continuous ground plane and their effect on the extracted transistor parameters are studied in terms of the measurement discontinuities encountered. Measurement results are discussed in conjunction with electromagnetic (EM) co-simulations, which use the small-signal equivalent circuit model of transistor along with the 3D models of the probes and test structures. The electric field coupling between the probes is visualised in each case and conclusions are drawn.

AB - This study analyses the effect of test structure design for on-wafer TRL calibration of 28nm FD-SOI MOSFETs upto 110 GHz. Two different calibration kits are designed with and without continuous ground plane and their effect on the extracted transistor parameters are studied in terms of the measurement discontinuities encountered. Measurement results are discussed in conjunction with electromagnetic (EM) co-simulations, which use the small-signal equivalent circuit model of transistor along with the 3D models of the probes and test structures. The electric field coupling between the probes is visualised in each case and conclusions are drawn.

UR - https://www.scopus.com/pages/publications/85163888441

UR - https://www.scopus.com/pages/publications/85163888441#tab=citedBy

U2 - 10.1109/ARFTG56062.2023.10148879

DO - 10.1109/ARFTG56062.2023.10148879

M3 - Conference contribution

AN - SCOPUS:85163888441

T3 - 100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023

BT - 100th ARFTG Microwave Measurement Conference

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 100th ARFTG Microwave Measurement Conference, ARFTG 2023

Y2 - 22 January 2023 through 25 January 2023

ER -

Pradeep K, Fregonese S, Deng M, Dormieu B, Scheer P, Zimmer T. Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz. In 100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023. Institute of Electrical and Electronics Engineers Inc. 2023. (100th ARFTG Microwave Measurement Conference: Measurement Challenges For Emerging Rf-to-Thz Technologies, ARFTG 2023). doi: 10.1109/ARFTG56062.2023.10148879

Study on Measurement Discontinuity during On-wafer TRL Calibration of 28FD-SOI Devices upto 110GHz

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