Abstract
This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.
Original language | English |
---|---|
Title of host publication | Nanosensors, Microsensors, and Biosensors and Systems 2007 |
Volume | 6528 |
DOIs | |
Publication status | Published - 01-11-2007 |
Externally published | Yes |
Event | Nanosensors, Microsensors, and Biosensors and Systems 2007 - San Diego, CA, United States Duration: 21-03-2007 → 22-03-2007 |
Conference
Conference | Nanosensors, Microsensors, and Biosensors and Systems 2007 |
---|---|
Country/Territory | United States |
City | San Diego, CA |
Period | 21-03-07 → 22-03-07 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering