Uncertainty analysis of microresonator using classical and interval methods

B. Vasuki; M. Umapathy; G. Uma; M. Shanmugavalli; S. Meenachisundaram

doi:10.1117/12.716054

Uncertainty analysis of microresonator using classical and interval methods

B. Vasuki, M. Umapathy, G. Uma, M. Shanmugavalli, S. Meenachisundaram

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.

Original language	English
Title of host publication	Nanosensors, Microsensors, and Biosensors and Systems 2007
Volume	6528
DOIs	https://doi.org/10.1117/12.716054
Publication status	Published - 01-11-2007
Externally published	Yes
Event	Nanosensors, Microsensors, and Biosensors and Systems 2007 - San Diego, CA, United States Duration: 21-03-2007 → 22-03-2007

Conference

Conference	Nanosensors, Microsensors, and Biosensors and Systems 2007
Country/Territory	United States
City	San Diego, CA
Period	21-03-07 → 22-03-07

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.716054

Cite this

@inproceedings{7eb07d7564f4419fac090aa88ce3ff82,

title = "Uncertainty analysis of microresonator using classical and interval methods",

abstract = "This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.",

author = "B. Vasuki and M. Umapathy and G. Uma and M. Shanmugavalli and S. Meenachisundaram",

year = "2007",

month = nov,

day = "1",

doi = "10.1117/12.716054",

language = "English",

isbn = "0819466492",

volume = "6528",

booktitle = "Nanosensors, Microsensors, and Biosensors and Systems 2007",

note = "Nanosensors, Microsensors, and Biosensors and Systems 2007 ; Conference date: 21-03-2007 Through 22-03-2007",

}

TY - GEN

T1 - Uncertainty analysis of microresonator using classical and interval methods

AU - Vasuki, B.

AU - Umapathy, M.

AU - Uma, G.

AU - Shanmugavalli, M.

AU - Meenachisundaram, S.

PY - 2007/11/1

Y1 - 2007/11/1

N2 - This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.

AB - This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.

UR - http://www.scopus.com/inward/record.url?scp=35548936511&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=35548936511&partnerID=8YFLogxK

U2 - 10.1117/12.716054

DO - 10.1117/12.716054

M3 - Conference contribution

AN - SCOPUS:35548936511

SN - 0819466492

SN - 9780819466495

VL - 6528

BT - Nanosensors, Microsensors, and Biosensors and Systems 2007

T2 - Nanosensors, Microsensors, and Biosensors and Systems 2007

Y2 - 21 March 2007 through 22 March 2007

ER -

Uncertainty analysis of microresonator using classical and interval methods

Abstract

Conference

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this