Uncertainty analysis of microresonator using classical and interval methods

B. Vasuki; M. Umapathy; G. Uma; M. Shanmugavalli; S. Meenachisundaram

doi:10.1117/12.716054

Uncertainty analysis of microresonator using classical and interval methods

B. Vasuki^*, M. Umapathy, G. Uma, M. Shanmugavalli, S. Meenachisundaram

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.

Original language	English
Title of host publication	Nanosensors, Microsensors, and Biosensors and Systems 2007
Volume	6528
DOIs	https://doi.org/10.1117/12.716054
Publication status	Published - 01-11-2007
Externally published	Yes
Event	Nanosensors, Microsensors, and Biosensors and Systems 2007 - San Diego, CA, United States Duration: 21-03-2007 → 22-03-2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6528
ISSN (Print)	0277-786X

Conference

Conference	Nanosensors, Microsensors, and Biosensors and Systems 2007
Country/Territory	United States
City	San Diego, CA
Period	21-03-07 → 22-03-07

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.716054

Cite this

Vasuki, B., Umapathy, M., Uma, G., Shanmugavalli, M., & Meenachisundaram, S. (2007). Uncertainty analysis of microresonator using classical and interval methods. In Nanosensors, Microsensors, and Biosensors and Systems 2007 (Vol. 6528). Article 652812 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6528). https://doi.org/10.1117/12.716054

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title = "Uncertainty analysis of microresonator using classical and interval methods",

abstract = "This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.",

author = "B. Vasuki and M. Umapathy and G. Uma and M. Shanmugavalli and S. Meenachisundaram",

year = "2007",

month = nov,

day = "1",

doi = "10.1117/12.716054",

language = "English",

isbn = "0819466492",

volume = "6528",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Nanosensors, Microsensors, and Biosensors and Systems 2007",

note = "Nanosensors, Microsensors, and Biosensors and Systems 2007 ; Conference date: 21-03-2007 Through 22-03-2007",

}

Vasuki, B, Umapathy, M, Uma, G, Shanmugavalli, M & Meenachisundaram, S 2007, Uncertainty analysis of microresonator using classical and interval methods. in Nanosensors, Microsensors, and Biosensors and Systems 2007. vol. 6528, 652812, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007, San Diego, CA, United States, 21-03-07. https://doi.org/10.1117/12.716054

Uncertainty analysis of microresonator using classical and interval methods. / Vasuki, B.; Umapathy, M.; Uma, G. et al.
Nanosensors, Microsensors, and Biosensors and Systems 2007. Vol. 6528 2007. 652812 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6528).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Uncertainty analysis of microresonator using classical and interval methods

AU - Vasuki, B.

AU - Umapathy, M.

AU - Uma, G.

AU - Shanmugavalli, M.

AU - Meenachisundaram, S.

PY - 2007/11/1

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N2 - This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.

AB - This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.

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M3 - Conference contribution

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SN - 0819466492

SN - 9780819466495

VL - 6528

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Nanosensors, Microsensors, and Biosensors and Systems 2007

T2 - Nanosensors, Microsensors, and Biosensors and Systems 2007

Y2 - 21 March 2007 through 22 March 2007

ER -

Uncertainty analysis of microresonator using classical and interval methods

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